Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
Reexamination Certificate
2005-08-13
2010-06-22
Siek, Vuthe (Department: 2825)
Computer-aided design and analysis of circuits and semiconductor
Nanotechnology related integrated circuit design
C716S030000, C716S030000, C430S030000
Reexamination Certificate
active
07743359
ABSTRACT:
An apparatus and method of synthesizing a photolithographic data set includes using a first computational model to calculate a first figure-of-merit for the photolithographic data set; changing a first part of the photolithographic data set to increase the first figure-of-merit; and then using a second computational model to calculate a second figure-of-merit of the photolithographic data set; and changing a second part of the photolithographic data set to increase the second figure-of-merit. The second computational model enables figure-of-merit calculations to be executed at a significantly faster execution rate than the first computational model.
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Horng Chi-Song
Huang Hsu-Ting
Prasad Roy
Sezginer Abdurrahman
Cadence Design Systems Inc.
Sandoval Patrick
Sheppard Mullin Richter & Hampton LLP
Siek Vuthe
LandOfFree
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