Apparatus and method for on-line decomposition of hydrogen perox

Details Apparatus and method for on-line decomposition of hydrogen perox Apparatus and method for on-line decomposition of hydrogen perox

1998-09-22

2000-11-14

Soderquist, Arlen

Chemistry: analytical and immunological testing

Metal or metal containing

436 79, 436 80, 436 81, 436 82, 436 83, 436 84, 436135, 436159, 436175, 436181, G01N 3320

Patent

active

061468983

ABSTRACT:
An apparatus and method for on-line decomposition of a hydrogen peroxide solution, for use in fabricating a semiconductor device, includes a membrane tube having a porous plug inserted in each end, with the porous plugs defining a space where a platinum catalyst is disposed. A first coupling tube is inserted into one end of the membrane tube to supply a hydrogen peroxide sample to the membrane tube. The hydrogen peroxide contained in hydrogen peroxide sample is decomposed into water and oxygen gas according to an action of the platinum catalyst. A second coupling tube is inserted into a second end of the membrane tube to discharge a diluted hydrogen peroxide solution to an analytical instrument, where the decomposed hydrogen peroxide solution is analyzed on-line.

REFERENCES:
patent: 3894538 (1975-07-01), Richter
patent: 3912451 (1975-10-01), Gaglia, Jr.
patent: 3996141 (1976-12-01), Updike
patent: 4279883 (1981-07-01), Izumi et al.
patent: 4601884 (1986-07-01), Coeckelberghs et al.
patent: 4750610 (1988-06-01), Ryder
patent: 4792435 (1988-12-01), Nakajima
patent: 5227042 (1993-07-01), Zawodzinski et al.
patent: 5292515 (1994-03-01), Moro et al.
patent: 5536241 (1996-07-01), Zapol
patent: 5711146 (1998-01-01), Armstrong et al.
M. V. Twigg "Catalyst Handbook" 1989, Wolfe Publishing Ltd. pp. 34-35.
M. Aoyagi et al. Chem. Abstr. 1991, 114, 220331w, Jun. 1991.
H. S. Folger "Elements of Chemical Reaction Engineering" 1992, Prentice Hall Inc. pp. 163-165.

Affiliated with

Also associated with

Rating

Apparatus and method for on-line decomposition of hydrogen perox does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and method for on-line decomposition of hydrogen perox, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for on-line decomposition of hydrogen perox will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2064020