Apparatus and method for on-line decomposition of hydrogen perox

Details Apparatus and method for on-line decomposition of hydrogen perox Apparatus and method for on-line decomposition of hydrogen perox

1997-04-24

1999-08-17

Tran, Hien

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including solid, extended surface, fluid contact reaction...

422239, 422312, B01J 700

Patent

active

059390328

ABSTRACT:
An apparatus and method for on-line decomposition of a hydrogen peroxide solution, for use in fabricating a semiconductor device, includes a membrane tube having a porous plug inserted in each end, with the porous plugs defining a space where a platinum catalyst is disposed. A first coupling tube is inserted into one end of the membrane tube to supply a hydrogen peroxide sample to the membrane tube. The hydrogen peroxide contained in hydrogen peroxide sample is decomposed into water and oxygen gas according to an action of the platinum catalyst. A second coupling tube is inserted into a second end of the membrane tube to discharge a diluted hydrogen peroxide solution to an analytical instrument, where the decomposed hydrogen peroxide solution is analyzed on-line.

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Fogler, Scott H. (Elements of Chemical Reaction Engineering, Prentice Hall, Inc. ) p 163-165, 1992.
Twigg, M.V. (Catalyst Handbook, Wolfe Publishing Ltd. ) p 34-35, 1989.

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