Apparatus and method for mounting a hard pellicle

Details Apparatus and method for mounting a hard pellicle Apparatus and method for mounting a hard pellicle

2006-06-13

2006-06-13

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C430S005000, C430S311000

Reexamination Certificate

active

07061589

ABSTRACT:
An apparatus for mounting at least one hard pellicle to a mask which includes an enclosure having an interior cavity, demounting means for removing a protective cover from a mask, mounting means for mounting at least one hard pellicle to the mask and conduit means for pumping a light-transmitting gas into the interior cavity between the hard pellicle and the mask.

REFERENCES:
patent: 4378953 (1983-04-01), Winn
patent: 6264773 (2001-07-01), Cerio
patent: 6279249 (2001-08-01), Dao et al.
patent: 6300019 (2001-10-01), Ikeda et al.
patent: 6715495 (2004-04-01), Dao et al.
patent: 6731378 (2004-05-01), Hibbs
patent: 2002/0154285 (2002-10-01), Ramamoorthy et al.
patent: 2003/0227605 (2003-12-01), del Puerto et al.

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