Apparatus and method for modifying an object

Details Apparatus and method for modifying an object Apparatus and method for modifying an object

2006-05-02

2009-02-24

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492100, C250S492300, C250S306000, C250S307000, C250S310000, C073S105000

Reexamination Certificate

active

07495240

ABSTRACT:
A method and apparatus includes positioning a reactant on a surface in specific location and then directing an energy source from a device at the reactant such that it modifies the surface to either remove material or add material.

REFERENCES:
patent: 3991296 (1976-11-01), Kojima et al.
patent: 4037075 (1977-07-01), Pugsley et al.
patent: 4379022 (1983-04-01), Melcher et al.
patent: 4413020 (1983-11-01), McKee et al.
patent: 4414059 (1983-11-01), Blum et al.
patent: 4568409 (1986-02-01), Caplan
patent: 4697041 (1987-09-01), Okaniwa et al.
patent: 4877481 (1989-10-01), Fukuda et al.
patent: 4987855 (1991-01-01), Ahlgren
patent: 5183534 (1993-02-01), Fjare et al.
patent: 5298760 (1994-03-01), Fuchs et al.
patent: 5432015 (1995-07-01), Wu et al.
patent: 5460687 (1995-10-01), Douglas
patent: 5569398 (1996-10-01), Sun et al.
patent: 5569399 (1996-10-01), Penney et al.
patent: 5641391 (1997-06-01), Hunter et al.
patent: 5679472 (1997-10-01), Wu et al.
patent: 5683547 (1997-11-01), Azuma et al.
patent: 5702565 (1997-12-01), Wu et al.
patent: 5824374 (1998-10-01), Bradley, Jr. et al.
patent: 5830376 (1998-11-01), Bohlke et al.
patent: 5932118 (1999-08-01), Yamamoto et al.
patent: 6007969 (1999-12-01), Hatakeyama et al.
patent: 6063695 (2000-05-01), Lin et al.
patent: 6337479 (2002-01-01), Kley
patent: 6353219 (2002-03-01), Kley
patent: 6395650 (2002-05-01), Callegari et al.
patent: 6403388 (2002-06-01), Birdsley et al.
patent: 6555016 (2003-04-01), Lai
patent: 6635311 (2003-10-01), Mirkin et al.
patent: 6674074 (2004-01-01), Schwartz
patent: 6679996 (2004-01-01), Yao
patent: 6709720 (2004-03-01), Hayakawa et al.
patent: 6737646 (2004-05-01), Schwartz
patent: 6827979 (2004-12-01), Mirkin et al.
patent: 6998689 (2006-02-01), Kley
patent: 7005389 (2006-02-01), Ko et al.
patent: 7323699 (2008-01-01), Hopkins et al.
patent: 2003/0068446 (2003-04-01), Mirkin et al.
patent: 2003/0157254 (2003-08-01), Mirkin et al.
patent: 2004/0008330 (2004-01-01), Mirkin et al.
patent: 2004/0028814 (2004-02-01), Mirkin et al.
patent: 2004/0037959 (2004-02-01), Mirkin et al.
patent: 2005/0016954 (2005-01-01), Hamann et al.
patent: 2005/0247874 (2005-11-01), Ando et al.
patent: 359067634 (1984-04-01), None
patent: 401295424 (1989-11-01), None
patent: 2001319923 (2001-11-01), None
patent: WO2004/023490 (2004-03-01), None
M. Datta, et al., “Laser Etching of Metals In Neutral Salt Solutions”, Appl. Phys. Lett. 51(24), Dec. 14, 1987, pp. 2040-2042.
R.J. vonGutfeld, et al., “Laser Enhanced Etching in KOH”, Appl. Phys. Lett. 40(4), Feb. 15, 1982, pp. 352-354.
Y.S. Shin, et al., “Laser-Assisted Etching of Titanium Foil in Phosphoric Acid for Direct Fabrication of Microstructures”, Journal of Laser Applicatons, 15(4), Nov. 2003, pp. 240-246.
P.A. Moskowitz, et al., “Laser Micromachining of Polyimide Materials”, Polyimides, vol. 1, 1984, pp. 365-376.
R.J. vonGutfeld et al., “Electrochemical Microfabrication by Laser-Enhanced Photothermal Processes”, 42(5), 1998, pp. 1-12.
B.W. Hussey, et al., “Role of Bubbles in Laser-Assisted Wet Etching”, Appl. Phys. Lett. 58(24), Jun. 17, 1991, pp. 2851-2853.
Edward K. Yung, et al., “Laser-Assisted Etching of Manganese-Zinc-Ferrite”, J. Elecrochem. Soc., vol. 136, No. 3, Mar. 1989, p. 665.
A. Aliouchouche, et al., “Laser Chemical Etching of Copper Films”, SPIE, vol. 2403, pp. 425-2403.
R.J. vonGutfeld, et al., “Laser Chemical Etching of Metals in Sodium Nitrate Solutions”, J. Appl. Phys. 64(10), Nov. 15, 1988, pp. 5197-5200.
R. Nowak, et al., “Laser Chemical Etching of Metals in Liquids”, Materials and Manufacturing Processes, vol. 9, No. 3, pp. 429-446, 1994.
International Search Report dated Sep. 26, 2006 submitted previously in parent U.S. Appl. No. 11/047,877, filed Feb. 2, 2005.

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