Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
Patent
1998-02-20
1999-12-28
Gibson, Randy W.
Thermal measuring and testing
Temperature measurement
In spaced noncontact relationship to specimen
374130, 219405, G01J 506, G01J 508
Patent
active
060072415
ABSTRACT:
An apparatus for measuring the temperature of a substrate in a thermal processing chamber. The substrate is suspended above a reflector to form a reflecting cavity. A probe of a temperature sensor has an input end positioned to receive radiation from the reflecting cavity and an output end optically coupled to a detector to provide a temperature reading. The temperature sensor is configured to reduce the effect that radiation which has an axis of propagation within an angle of an axis normal to the reflector, e.g., substantially normal radiation from a portion of the substrate adjacent to the input end of the probe, has on the temperature reading.
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Hunter Aaron M.
Yam Mark
Applied Materials Inc.
Gibson Randy W.
Pruchnic Jr. Stanley J.
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