Apparatus and method for measuring optical properties of a coati

Details Apparatus and method for measuring optical properties of a coati Apparatus and method for measuring optical properties of a coati

1999-08-03

2000-07-25

Font, Frank G.

Optics: measuring and testing

Of light reflection

356400, 356432, G01B 1100, G01N 2100, G01N 2155

Patent

active

060942754

ABSTRACT:
A test apparatus for measuring optical properties of a coating layer on a semiconductor substrate and a method for using such apparatus are disclosed. In the apparatus, a fixed stage and a traversing stage are utilized such that a semiconductor substrate can be mounted in the traversing stage and moved about on the fixed stage without having the substrate surface touching the fixed stage. Damages such as scratches on the substrate surface can therefore be avoided. On top of the fixed stage, a plurality of indexing marks are further provided such that the same locations on each wafer measured are fixed for taking an average value across the entire surface of the wafer. A reliable and repeatable test method is thus provided to improve the fabrication process for semiconductor substrates that have coating layers deposited on top.

REFERENCES:
patent: 4795260 (1989-01-01), Schuur et al.

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