Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1985-08-19
1987-06-30
Church, Craig E.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250307, 250396R, 250398, G01N 2300
Patent
active
046772960
ABSTRACT:
A method and apparatus for measuring lengths in a scanning particle microscope employ a device for generating a particle beam directed toward a specimen stage on which a specimen is mounted. A second stage is placed over the specimen stage above the specimen, the second stage carrying a calibrated grid structure covering the region of the specimen to be measured. The grid structure is disposed a distance from the specimen which is less than or equal to the depth of focus of the apparatus. The grid structure is of known dimensions, and is utilized to provide bench marks for measuring distances on the specimen, and can be displaced as needed to measure longer distances.
REFERENCES:
patent: 3560781 (1967-07-01), Riecke
patent: 3864597 (1975-02-01), Trotel
patent: 3875414 (1975-04-01), Prior
patent: 4219719 (1980-08-01), Frosien et al.
patent: 4223220 (1980-09-01), Feuerbaum
patent: 4370554 (1983-01-01), Bohlen et al.
"Automatic Pattern Positioning of Scanning Electron Beam Exposure", Miyauchi et al, IEEE Transactions on Electron Devices, vol. ED-17, No. 6, Jun. 1970.
Frosien Juergen
Lischke Burkhard
Church Craig E.
Freeman John C.
Siemens Aktiengesellschaft
LandOfFree
Apparatus and method for measuring lengths in a scanning particl does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus and method for measuring lengths in a scanning particl, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for measuring lengths in a scanning particl will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-449287