Apparatus and method for measuring in-plane distribution of surf

Details Apparatus and method for measuring in-plane distribution of surf Apparatus and method for measuring in-plane distribution of surf

1997-02-07

1998-09-29

Hantis, K.

Optics: measuring and testing

Angle measuring or angular axial alignment

Sides of angle or axes being aligned transverse to optical...

356138, G01B 1126

Patent

active

058152563

ABSTRACT:
In an apparatus and method for measuring in-plane distribution of surface free energy, a target substrate is immersed in a liquid, and a parameter representing a state of meniscus to be formed at an intersection area of a target surface with a surface of the liquid is measured along the surface of the liquid. This measurement is performed by descending or ascending the substrate, thereby measuring the parameter throughout the entire surface of the target surface, and then, the in-plane distribution of the surface free energy of the target surface is calculated.

REFERENCES:
patent: 4848270 (1989-07-01), Wakayama et al.
patent: 4943160 (1990-07-01), Gevelber et al.
patent: 5286529 (1994-02-01), Nakayama et al.
Chappuis et al, "Contribution to the Study of Wetting: Analysis of a Measurement Method", Journal De Chime Physique vol. 71. No. 4, 1974 Translation of entire document attached.

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