Apparatus and method for measuring contaminants in semiconductor

Details Apparatus and method for measuring contaminants in semiconductor Apparatus and method for measuring contaminants in semiconductor

1998-06-30

2000-03-07

Williams, Hezron

Measuring and testing

Gas analysis

Gas chromatography

73 2337, 356316, 324468, 436153, 422 89, 250326, G01N 3074, G01N 2762, H01J 4942, G01D 5544

Patent

active

060325135

ABSTRACT:
An trace analyzer apparatus and method useful in semiconductor processing for measuring trace impurities in gases and liquids comprising a gas chromatograph serving to replace a bulk gas in a composition of bulk gas including contaminants in a bulk gas stream with a carrier gas having a higher ionization potential than that of said contaminants, where such gas chromatograph is connected to a hollow electrode (14) for initiating ionization of said contaminants by electrical discharge, where such electrode is electrically isolated from a source housing (44) and adjacent to a skimmer plate (16) that ionizes trace contaminants that are measured using a mass spectrometer, is disclosed.

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