Fishing – trapping – and vermin destroying
Patent
1997-01-29
1997-12-23
Bueker, Richard
Fishing, trapping, and vermin destroying
437228, 437241, 427569, 427579, 118723E, 118728, 118500, 156345, 1566431, 20429815, H01L 2100, H01L 21318
Patent
active
057007250
ABSTRACT:
An improved apparatus and method for the manufacture of integrated circuits is disclosed. At least three protrusions extend from the wafer support susceptor. The protrusions slightly electrically decouple the wafer from the susceptor during plasma processing. The protrusions prevent gradual debris build-up on the susceptor from causing variation from lot-to-lot in plasma processing results.
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Hower Glenn Roy
Kumagai Henry Y.
Bueker Richard
Lucent Technologies - Inc.
Lund Jeffrie R.
Rehberg John T.
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