Apparatus and method for maintaining a uniform etching solution

Details Apparatus and method for maintaining a uniform etching solution Apparatus and method for maintaining a uniform etching solution

1987-01-28

1987-12-01

Bashore, S. Leon

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156642, 156665, H01L 21306

Patent

active

047102616

ABSTRACT:
An apparatus and method are disclosed for replenishing the depleted component of a multicomponent etching solution. A portion of the etching solution is analyzed with a UV detector to determine the concentration of the depleted component. An output signal is produced by the UV detector which is a function of the depleted component's concentration. In response to this output signal, a microprocessor is used to control the amount of make-up solution, enriched with the depleted component of the multicomponent etching solution, which is added to the etching solution. With the use of this system, a substantially uniform etch bath composition is maintained.

REFERENCES:
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patent: 4060097 (1977-11-01), Oxford
patent: 4132585 (1979-01-01), Oxford
patent: 4400270 (1983-08-01), Hillman
patent: 4493745 (1985-01-01), Chen et al.
patent: 4615761 (1986-10-01), Tada et al.
Quantitative Analytical Chemistry 2nd Ed. Flaschka, Barnard, Jr., Sturrock, Willard Grant Press Boston, MA, 1980.

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