Apparatus and method for locating target area for electron micro

Details Apparatus and method for locating target area for electron micro Apparatus and method for locating target area for electron micro

1991-04-23

1992-06-02

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250305, 250306, 250307, H01J 37256

Patent

active

051189410

ABSTRACT:
Target area on a specimen surface is located in an electron microanalyzer system that includes an electron energy analyzer and an analyzer detector. An electron gun impinges a rastering beam of incident electrons across the surface, a secondary electron detector provides corresponding signals for producing a scanning electron microscope image of the surface. Backscattered electrons effected from the incident electrons are passed through the analyzer for producing a further image that is superimposed on the SEM image to locate the target area to be subject to a separate microanalysis. Particularly for an electrically insulating specimen surface, the images are produced in a single frame of rastering, and surface area and beam current are sufficient to produce the images without substantial charge buildup.

REFERENCES:
patent: 3766381 (1973-10-01), Watson
patent: 3889115 (1975-06-01), Tamura et al.
patent: 4041311 (1977-08-01), Martin
patent: 4048498 (1977-09-01), Berlach et al.
patent: 4219731 (1980-08-01), Migitaka et al.
patent: 4560872 (1985-12-01), Antonovsky
patent: 4894541 (1990-01-01), Ono
"How To Obtain Backscattered Electron Images" by D. P. Paul.
"Imaging With Backscattered Electrons In A Scanning Electron Microscope" by V.N.E. Robinson, Scanning 3, 15-26 (1980).
"Scanning Electron Microscopy" by O. C. Wells, A. Boyde, E. Lifshin and A. Rezanowich (McGraw-Hill, 1974).

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