Apparatus and method for isolating and measuring movement in...

Details Apparatus and method for isolating and measuring movement in... Apparatus and method for isolating and measuring movement in...

2005-08-16

2005-08-16

Larkin, Daniel S. (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

Reexamination Certificate

active

06928863

ABSTRACT:
A metrology apparatus includes an actuator with a first actuator stage to controllably move in first and second orthogonal directions, and a second actuator stage adjacent to the first actuator stage to controllably move in a third direction orthogonal to the first and second orthogonal directions. A coupling is coupled to the second actuator stage and to a multi-bar linkage assembly fixed to a second end of a reference structure. The linkage supports a sample holder and transmits appropriate displacements generated by the actuator thereof The second actuator stage and the coupling move the linkage in the third orthogonal direction in a manner that substantially isolates the linkage from any second actuator stage motion in the first and second directions. An objective is fixed to the reference structure and is located between a light source and a position sensor. The position sensor measures first actuator stage motion in the first and second directions.

REFERENCES:
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patent: 5196713 (1993-03-01), Marshall
patent: 5298975 (1994-03-01), Khoury et al.
patent: 5519212 (1996-05-01), Elings et al.
patent: 5835251 (1998-11-01), Toda et al.
patent: 5939719 (1999-08-01), Park et al.

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