Apparatus and method for irradiating electron beam

Details Apparatus and method for irradiating electron beam Apparatus and method for irradiating electron beam

2007-10-16

2007-10-16

Berman, Jack I. (Department: 2881)

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

C250S492100, C250S492220, C250S453110, C250S454110, C250S455110, C422S022000

Reexamination Certificate

active

11029815

ABSTRACT:
An electron beam irradiation apparatus includes a turn-transfer mechanism; a turn-transfer chamber; an electron beam irradiation section; a replacement room configured to bring a target into and out of the turn-transfer chamber; an outer irradiation target holding table configured to form a part of the replacement room, and including an X-ray shielding mechanism, an airtightness maintaining mechanism, and a target holding mechanism; an inner irradiation target holding table, configured to form a part of the replacement room, and including an X-ray shielding mechanism, an airtightness maintaining mechanism, and a target holding mechanism, the inner irradiation target holding table being supported by the turn-transfer mechanism; a turning mechanism configured to turn the turn-transfer mechanism and an elevator mechanism configured to move the turn-transfer mechanism up and down; and a rotation mechanism disposed at the electron beam irradiation section and configured to rotate the target.

REFERENCES:
patent: 5414267 (1995-05-01), Wakaopulos
patent: 2-208325 (1990-08-01), None
patent: 7-019340 (1995-01-01), None
patent: 9-101400 (1997-04-01), None
Related U.S. Appl. No. 11/029,810, filed Jan. 4, 2005; Inventor: Mamoru Usami et al.; Entitled: Apparatus and Method for Irradiating Electron Beam.

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