Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2007-06-19
2007-06-19
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S310000, C250S306000, C250S307000, C250S309000
Reexamination Certificate
active
11106368
ABSTRACT:
An apparatus for investigating and/or modifying a sample with charged particles, in particular a scanning electron microscope, is provided. The apparatus comprises a beam (1, 2) of charged particles, a shielding element (10) having an opening (30) for the beam of charged particles to pass through, wherein the opening (30) is sufficiently small and the shielding element (10) sufficiently closely positioned to the surface (20) of the sample to reduce the influence of charge accumulation effects at the surface on the beam of charged particles.
REFERENCES:
patent: 4818872 (1989-04-01), Parker et al.
patent: 4992661 (1991-02-01), Tamura et al.
patent: 5591971 (1997-01-01), Shahar et al.
patent: 6344750 (2002-02-01), Lo et al.
patent: 6373054 (2002-04-01), Hiroi et al.
patent: 6512228 (2003-01-01), Todokoro et al.
patent: 6570154 (2003-05-01), Masnaghetti et al.
patent: 6586736 (2003-07-01), McCord
patent: 6664546 (2003-12-01), McCord et al.
patent: 6683320 (2004-01-01), Gerlach et al.
patent: 6979822 (2005-12-01), Stewart et al.
patent: 2004/0169141 (2004-09-01), Adamec et al.
patent: 2005/0103272 (2005-05-01), Koops et al.
patent: 35 45 350 (1984-07-01), None
patent: 44 12 415 (1994-10-01), None
patent: 102 08 043 (2003-08-01), None
patent: 0 884 759 (1998-12-01), None
Hans W.P. Koops, M. Weber, C. Schossler and A. Kaja; “Three-Dimensional additive electron-beam lithography”; Metal/Nonmetal Microsystems: Physics, Technology, and Applications, SPIE Proceedings—The International Society for Optical Engineering, Apr. 1996; pp. 388-395; vol. 2780.
International search report for application No. PCT/EP2005/004036 mailed Jun. 15, 2005.
Edinger Klaus
Hofmann Thorsten
Sellmair Josef
Berman Jack I.
Hashmi Zia R.
Hood Jeffrey C.
Meyertons Hood Kivlin Kowert & Goetzel P.C.
NaWoTec GmbH
LandOfFree
Apparatus and method for investigating or modifying a... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus and method for investigating or modifying a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for investigating or modifying a... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3834900