Apparatus and method for inspection and measurement

Details Apparatus and method for inspection and measurement Apparatus and method for inspection and measurement

2011-03-22

2011-03-22

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S310000, C250S492200, C250S492220, C250S492300, C382S145000

Reexamination Certificate

active

07910884

ABSTRACT:
An electrification control electrode B is installed at a measured or inspected specimen side of an electrification control electrode A, and a constant voltage is applied from an electrification control electrode control portion of an electrification control electrode B according to an electrification state of a specimen, whereby a variation of an electrification state and a potential barrier of a specimen surface formed before an inspection is suppressed. A retarding potential is applied by an electrification control electrode, and the electrification control electrode B is disposed below the electrification control electrode A adjusted to equal potential to a specimen. As a result, it is possible to adjust the amount that secondary electrons emitted from a specimen such as a wafer to which a primary electron beam is irradiated return to a specimen, and thus it is possible to stably maintain an inspection condition of high sensitivity during an inspection.

REFERENCES:
patent: 6586736 (2003-07-01), McCord
patent: 7019294 (2006-03-01), Koyama et al.
patent: 7276693 (2007-10-01), Koyama et al.
patent: 7557347 (2009-07-01), Shojo et al.
patent: 7655906 (2010-02-01), Cheng et al.
patent: 2007/0040118 (2007-02-01), Cheng et al.
patent: 2000-208579 (2000-07-01), None
patent: 2004-342470 (2004-12-01), None
patent: 2006-234789 (2006-09-01), None
patent: 03/007330 (2003-01-01), None

Affiliated with

Also associated with

Rating

Apparatus and method for inspection and measurement does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and method for inspection and measurement, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for inspection and measurement will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2770733