Apparatus and method for inspecting film defect

Details Apparatus and method for inspecting film defect Apparatus and method for inspecting film defect

2006-02-23

2008-08-05

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S239100, C356S239700

Reexamination Certificate

active

07408633

ABSTRACT:
There is disclosed a defect inspection apparatus, wherein a light source projects a linear light onto a transparent film to inspect, so that a light receiver receives light beams transmitted through the film. The light receiver is placed to look down the film, with its optical axis inclined by a cross angle θ1to a normal line that is perpendicular to the film surface, and the cross angle θ1is set in a range from 30° to 50°. The optical axis of the light receiver is also turned about the normal line by a rotational angle θ2to a transport direction (S) of the film. The rotational angle θ2is set in a range from minus 60° to plus 60°, on the assumption that the transport direction is zero degree.

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