Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1998-07-16
2000-12-19
Adams, Russell
Photocopying
Projection printing and copying cameras
Step and repeat
355 71, 362 19, G03B 2742, G03B 2772, F21V 914
Patent
active
061633674
ABSTRACT:
An adjustable, in-situ photolithography process is taught, where incident exposure light is passed through two polarizers; the first polarizer capable of altering its polarization direction, during exposure, relative to the polarization direction of the second polarizer, in order to enhance the contrast of a patterned image projected on a semiconductor wafer. The second polarizer in the optical train is a photo mask transparent substrate impregnated with colloidal crystals that are aligned in a fixed, predetermined direction by magnetic field. The photo mask may also contain a silicon compound for phase shifting the incident exposure light to further enhance the image contrast.
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Adams Russell
Anderson Jay H.
Curcio Robert
International Business Machines - Corporation
Kim Peter B.
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