Apparatus and method for image optimization of samples in a...

Details Apparatus and method for image optimization of samples in a... Apparatus and method for image optimization of samples in a...

2006-01-31

2006-01-31

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S492300

Reexamination Certificate

active

06992287

ABSTRACT:
A system and method for identifying an optimal landing energy of a probe current in a scanning electron microscope system. A probe current having a known landing energy is directed at a sample for producing a signal electron beam. The current of the signal electron beam is measured by directing the beam to a current detector for calculating a current yield, which is the ratio of the signal current to the probe current. The landing energy can then be changed for subsequent measurements of the signal current to identify the landing energy which produces a desired current yield. Once identified, the landing energy value can be used to produce a signal electron beam directed towards an imaging detector to generate topographic images of samples.

REFERENCES:
patent: 5731580 (1998-03-01), Sato et al.
patent: 6066849 (2000-05-01), Masnaghetti et al.
patent: 2002/0036264 (2002-03-01), Nakasuji et al.

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