Apparatus and method for high-speed transfer and centering of wa

Details Apparatus and method for high-speed transfer and centering of wa Apparatus and method for high-speed transfer and centering of wa

1997-11-26

2000-09-12

Morse, Gregory A.

Material or article handling

Article reorienting device

414783, 414941, B25J 1510

Patent

active

061168483

ABSTRACT:
An apparatus for centering and gripping semiconductor wafers. A solenoid is used to actuate two or three curved contacts. Power to the solenoid, and position information from the solenoid is transmitted along a pair of wires. To center the wafer, the solenoid is actuated and the contacts move radially towards the center of the wafer. The contacts grip the edge of the wafer and a pulse-width-modulation signal is used to determine solenoid position as a function of back electromotive force value or waveform. During handling, the contacts hold the wafer such that the wafer does not move relative to the apparatus.

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