Apparatus and method for high sensitivity read operation

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S314000, C257S315000, C257S316000, C257S320000, C257S321000, C257S322000, C257S326000

Reexamination Certificate

active

07075143

ABSTRACT:
A nonvolatile semiconductor memory device enabling a high sensitivity read operation by a low voltage, provided with a gate insulating film comprised of a bottom insulating film, a charge storing film, and a top insulating film successively stacked from the bottom, the bottom insulating film including a silicon oxynitride film directly under the charge storing film, and reading a bit of data stored at a local portion of a sub-source line side of a memory transistor and a bit of data stored at a local portion of a sub-bit line side independently by the reverse read method, whereby the incubation time is suppressed by the presence of silicon oxynitride, the controllability of the thickness of the charge storing film is improved, and the threshold voltage in an erase state is decreased, and a method of high sensitivity reading whereby a lower voltage and improved operational reliability are achieved.

REFERENCES:
patent: 5768192 (1998-06-01), Eitan
patent: 6444521 (2002-09-01), Chang et al.
patent: 6906390 (2005-06-01), Nomoto et al.
patent: 6949788 (2005-09-01), Fujiwara et al.

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