Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Reexamination Certificate
2002-10-22
2008-10-07
Wilson, Gregory A (Department: 3749)
Heating
Work feeding, agitating, discharging or conveying...
Removable furnace bottom section or kiln cart
C432S207000, C432S247000, C118S725000, C219S390000, C414S939000
Reexamination Certificate
active
07431585
ABSTRACT:
An apparatus for processing substrates is disclosed. In one embodiment, the apparatus includes a housing and a plurality of stacked cell structures in the housing. An actuator is adapted to move the plurality of stacked cell structures inside of the housing while substrates in the stacked cell structures are being heated.
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Maydan Dan
Moghadam Farhad
Quach David
Roberts Rick J.
Weidman Timothy
Applied Materials Inc.
Townsend and Townsend / and Crew LLP
Wilson Gregory A
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