Apparatus and method for heat treating thin film

Details Apparatus and method for heat treating thin film Apparatus and method for heat treating thin film

2007-08-21

2007-08-21

Smith, Matthew (Department: 2823)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S509000, C438S522000, C118S725000

Reexamination Certificate

active

11110933

ABSTRACT:
An apparatus for manufacturing a semiconductor device is disclosed which comprises a chamber which holds a to-be-processed substrate having a film containing at least one kind of metal element which will become a component of a volatile metal compound, a heater which heats the substrate held in the chamber, and an adsorbent which is provided in the chamber and which adsorbs the volatile metal compound generated from the film by heating the substrate.

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