X-ray or gamma ray systems or devices – Source – Electron tube
Reexamination Certificate
2005-11-22
2005-11-22
Bruce, David V. (Department: 2882)
X-ray or gamma ray systems or devices
Source
Electron tube
Reexamination Certificate
active
06968038
ABSTRACT:
Disclosed herein is a point-diffraction interferometer which can inspect a surface quality of an optical system for extreme ultraviolet lithography using a high-order harmonic X-ray source with excellent coherence, and an apparatus and method for generating a high-order harmonic X-ray. The present invention uses a high-order harmonic X-ray beam as a coherence light source, thus remarkably reducing the size of an apparatus for generating a light source to approximately 1/100 of a device using a light source generated in a conventional synchrotron. Further, the present invention simplifies the construction of an interferometer by employing a thin foil in which a pinhole is formed through a drilling technique using high power femtosecond laser, thus increasing the industrial utility of the interferometer.
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Lee Dong Gun
Nam Chang Hee
Bachman & LaPointe P.C.
Bruce David V.
Korea Advanced Institute of Science and Technology
Thomas Courtney
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