Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2007-11-20
2007-11-20
Berman, Jack I. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C250S309000, C250S307000, C250S492210, C250S491100, C250S492200, C250S492300, C156S922000, C156S922000, C156S922000, 43, 43, 43
Reexamination Certificate
active
11212673
ABSTRACT:
An apparatus for evaluating a cross section of a specimen in a specimen chamber, wherein the apparatus includes a specimen stage for placing the specimen, a temperature regulation unit for regulating the temperature of the specimen, an ion beam generation unit for irradiating the specimen with an ion beam thereby performing cross section processing and observation of the specimen, a detection unit for detecting emission signals emitted from the specimen in response to the irradiation of the ion beam for observing the specimen, and a marking unit for marking the specimen.
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Berman Jack I.
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Smyth Andrew
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