Apparatus and method for evaluating cross section of specimen

Radiant energy – Inspection of solids or liquids by charged particles

Reexamination Certificate

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Details

C250S309000, C250S307000, C250S492210, C250S491100, C250S492200, C250S492300, C156S922000, C156S922000, C156S922000, 43, 43, 43

Reexamination Certificate

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11212673

ABSTRACT:
An apparatus for evaluating a cross section of a specimen in a specimen chamber, wherein the apparatus includes a specimen stage for placing the specimen, a temperature regulation unit for regulating the temperature of the specimen, an ion beam generation unit for irradiating the specimen with an ion beam thereby performing cross section processing and observation of the specimen, a detection unit for detecting emission signals emitted from the specimen in response to the irradiation of the ion beam for observing the specimen, and a marking unit for marking the specimen.

REFERENCES:
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patent: 5155093 (1992-10-01), Den et al.
patent: 5504340 (1996-04-01), Mizumura et al.
patent: 5633502 (1997-05-01), Fischione
patent: 6593583 (2003-07-01), Iwasaki
patent: 6727500 (2004-04-01), Berger et al.
patent: 6949756 (2005-09-01), Gerlach et al.
patent: 2006/0197017 (2006-09-01), Motoi et al.
patent: 03/032360 (2003-04-01), None

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