Optics: measuring and testing – With plural diverse test or art
Patent
1998-09-24
1999-11-16
Evans, F. L.
Optics: measuring and testing
With plural diverse test or art
356311, 356316, 216 60, 438 16, G01N 2168, G01N 2162
Patent
active
059867477
ABSTRACT:
An apparatus and method for controlling a semiconductor fabrication process. The method comprises sampling a byproduct of a semiconductor fabrication process, isolating the sample from the process, exciting the sample to produce radiation and analyzing the radiation. A small evacuated analysis chamber is added to a process chamber to sample byproducts of a reaction taking place in the main chamber. Energy supplied by an excitation source excites the byproducts in the analysis chamber to produce radiation. Preferably the byproducts are ionized by a RF energy to produce a discharge in the analysis chamber. Radiation from the discharge, in the form of IR, UV or visible light, is analyzed by a conventional optical techniques such as OES. The method and apparatus enable optical endpoint detection for normally non-ionized gaseous interactions.
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Applied Materials Inc.
Evans F. L.
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