Abrading – Machine – Rotary tool
Patent
1995-10-27
1998-01-20
Rose, Robert A.
Abrading
Machine
Rotary tool
451285, 451286, 451446, 451447, B24B 500
Patent
active
057095930
ABSTRACT:
Slurry is provided to the surface of the polishing pad by pumping the slurry up through a central port, or by dripping the slurry down onto the surface of the polishing pad from a slurry feed tube. A slurry wiper, which may have one or more flexible members, sweeps the slurry evenly and thinly across the polishing pad. A control system coordinates the distribution of slurry to the polishing pad with the motion of the carrier head.
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Guthrie William L.
Ocanada Ivan A.
Shendon Norm
Spektor Semyon
Applied Materials Inc.
Nguyen George
Rose Robert A.
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