Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system
Reexamination Certificate
2002-06-24
2009-06-23
Le, John H (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Mechanical measurement system
C060S039281, C073S202500, C123S350000, C137S012000, C137S487500
Reexamination Certificate
active
07552015
ABSTRACT:
A mass flow controller includes a pressure sensor that senses pressure within the mass flow controller and displays the pressure. The pressure display may be local, mounted directly to the mass flow controller, or it may be connected through a link to the mass flow controller for remote display.
REFERENCES:
patent: 4170245 (1979-10-01), Haley
patent: 5062446 (1991-11-01), Anderson
patent: 5263369 (1993-11-01), Cutler
patent: 5660207 (1997-08-01), Mudd
patent: 5765283 (1998-06-01), Mudd
patent: 5805442 (1998-09-01), Crater et al.
patent: 5850850 (1998-12-01), Mudd et al.
patent: 5911238 (1999-06-01), Bump et al.
patent: 5944048 (1999-08-01), Bump et al.
patent: 6044701 (2000-04-01), Doyle et al.
patent: 6061603 (2000-05-01), Papadopoulos et al.
patent: 6119047 (2000-09-01), Eryurek et al.
patent: 6151625 (2000-11-01), Swales et al.
patent: 6192281 (2001-02-01), Brown et al.
patent: 6205409 (2001-03-01), Zvonar
patent: 6216726 (2001-04-01), Brown et al.
patent: 6321272 (2001-11-01), Swales
patent: 6332348 (2001-12-01), Yelverton et al.
patent: 6333272 (2001-12-01), McMillin et al.
patent: 6343617 (2002-02-01), Tinsley et al.
patent: 6370448 (2002-04-01), Eryurek
patent: 6450190 (2002-09-01), Ohmi et al.
patent: 6539968 (2003-04-01), White et al.
patent: 6619258 (2003-09-01), McKay et al.
patent: 6640140 (2003-10-01), Lindner et al.
patent: 6712084 (2004-03-01), Shajii et al.
patent: 6813875 (2004-11-01), Inoue
patent: 6868862 (2005-03-01), Shajii et al.
patent: 7004191 (2006-02-01), Shajii et al.
patent: 2003/0041135 (2003-02-01), Keyes et al.
patent: 0110325 (1984-06-01), None
patent: 0834723 (1998-04-01), None
International Search Report (PCT/US03/19969).
Ambrosina Jesse
Kottenstette Nicholas
Shajii Ali
Le John H
McDermott Will & Emery LLP
MKS Instruments Inc.
LandOfFree
Apparatus and method for displaying mass flow controller... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus and method for displaying mass flow controller..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for displaying mass flow controller... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4101287