Apparatus and method for displaying hole-electron pair distribut

Details Apparatus and method for displaying hole-electron pair distribut Apparatus and method for displaying hole-electron pair distribut

1985-06-28

1987-05-12

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250423F, 250307, H01J 3726

Patent

active

046653139

ABSTRACT:
An improved electron bombardment induced conductivity apparatus and method is described for charge collection imaging of semiconductor materials and devices with unprecedented resolution. This is accomplished by bombarding a very small area of the surface of a specimen with low-energy electrons rather than high-energy electrons and by physically scanning (i.e. moving) the electron source itself (rather than only the beam of electrons) with respect to the specimen. A very small area of the specimen surface is bombarded with low-energy electrons without any need to do focussing by emitting the low-energy electrons from a sharply pointed electrode positioned very close to the surface being bombarded with the low-energy electrons. Hole-electron pairs created by the electron bombardment are sensed (preferably collected by an electric field) and a measurement of the sensed number of such pairs is displayed in synchronism with the electrode scanning to produce a charge collection image of the specimen.

REFERENCES:
patent: 3448377 (1969-06-01), Seiwatz
patent: 3558880 (1971-01-01), Kniseley
patent: 3558885 (1971-01-01), Flemming
patent: 4343993 (1982-08-01), Binnig et al.
patent: 4575630 (1986-03-01), Lukianoff
"The Topografiner: An Instrument For Measuring Surface Microtopography", Young et al.
Review of Sci. Inst., vol 43, No. 7, 7-72, pp. 999-1011.

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