Apparatus and method for determining surface contour of piezoele

Details Apparatus and method for determining surface contour of piezoele Apparatus and method for determining surface contour of piezoele

1982-05-27

1985-02-05

Levy, Stewart J.

Electricity: measuring and testing

Determining nonelectric properties by measuring electric...

Semiconductors for nonelectrical property

G01N 2700

Patent

active

044980450

ABSTRACT:
An apparatus and a method utilizing a localized electrical field to precisely determine the surface contour of a substantially flat wafer of piezoelectric material having a slight convexity in its opposing faces.

REFERENCES:
patent: 4311959 (1982-01-01), Riessland et al.
patent: 4446432 (1984-05-01), Dworsky et al.
Dworsky, L. and Kennedy, G., "Air Gap Evaluation of Thin Quartz Plates", 35th Annual Symposium on Frequency Control, May 27-29, 1981.
Wafer Scan II, Bulletin 383A, ADE Corp., 1978.
An Engineering Bulletin of Motorola, Inc., Correlations, Winter 1981, pp. 9-15, "Analysis of Air-Gap Probe Measurements of AT-Cut Crystal Plates, Larry Dworsky.

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