Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2007-07-17
2007-07-17
Stafira, Michael P. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237300, C356S237400
Reexamination Certificate
active
10822055
ABSTRACT:
An apparatus for detecting particles located on an object includes an emitter for irradiating lights to the particles. The object is disposed on a stage in a direction substantially parallel to a surface of the object. The apparatus further includes a driver for generating a relative motion between the emitter and the object for scanning the surface of the object with the lights and a detector for detecting the lights emitted from the emitter or lights scattered from the particle. With embodiments of the present invention, the particles can be quickly detected.
REFERENCES:
patent: 4740079 (1988-04-01), Koizumi et al.
patent: 5225886 (1993-07-01), Koizumi et al.
patent: 5317380 (1994-05-01), Allemand
patent: 6144446 (2000-11-01), Nagasaki et al.
patent: 6288780 (2001-09-01), Fairley et al.
patent: 6313913 (2001-11-01), Nakagawa et al.
patent: 61-169750 (1986-07-01), None
patent: 11-284038 (1999-10-01), None
patent: 2000-0000242 (2000-01-01), None
patent: 2001-0086099 (2001-09-01), None
English Language Abstract of Korean Publication No. 2001-0086099.
Kim Deok-Yong
Yang Duck-Sun
Marger & Johnson & McCollom, P.C.
Samsung Electronics Co,. Ltd.
Stafira Michael P.
LandOfFree
Apparatus and method for detecting particles on an object does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus and method for detecting particles on an object, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for detecting particles on an object will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3737548