Measuring and testing – With fluid pressure – Leakage
Patent
1997-08-08
1999-08-17
Williams, Hezron
Measuring and testing
With fluid pressure
Leakage
204176, 42218607, 210760, G01M 326, C01B 1310, B01D 2400, B01J 1408
Patent
active
059396180
ABSTRACT:
The present invention discloses an apparatus and a method for detecting a gas leakage from a gas reactor by utilizing flow sensors mounted on and in fluid communication with a gas inlet conduit and a gas outlet conduit. The volume of gas flow through the inlet conduit and the outlet conduit are continuously monitored while the gas reactor is in its operating mode so that any gas leakage can be detected and the gas reactor can be shut off or bypassed in order to eliminate fire and safety hazards.
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Hu Tien J.
Tseng Jeng D.
Politzer Jay L.
Taiwan Semiconductor Manufacturing Company , Ltd.
Williams Hezron
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