Apparatus and method for cooling a substrate

Details Apparatus and method for cooling a substrate Apparatus and method for cooling a substrate

1995-12-22

1997-12-16

Leo, Leonard R.

Heat exchange

With retainer for removable article

165 802, 118728, 156345, F28F 700

Patent

active

056974272

ABSTRACT:
Apparatus and a concomitant method of supporting a substrate while providing effective backside cooling for the substrate. The apparatus comprises a platen having support pins, attached to the platen, for supporting a substrate in a spaced apart relation to the platen. The support pins cause a gap to be formed between the substrate and the platen. The platen contains at least one heat transfer medium supply portal that passes through the platen to supply a heat transfer medium to the gap between the substrate and platen. Lastly, the apparatus contains a flow control assembly, located proximate the peripheral edge of the substrate, for controlling the flow of the heat transfer medium through the gap between the platen and the substrate.

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