Apparatus and method for controlling ion beam

Details Apparatus and method for controlling ion beam Apparatus and method for controlling ion beam

2007-02-07

2009-12-08

Berman, Jack I (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S492100, C250S492200, C250S492210, C250S492300, C313S359100, C313S360100, C315S111310, C315S111610

Reexamination Certificate

active

07629589

ABSTRACT:
An apparatus and/or method for controlling an ion beam may be provided, and/or a method for preparing an extraction electrode for the same may be provided. In the apparatus, a plurality of extraction electrodes may be disposed in a path of an ion beam. At least one extraction electrode may include a plurality of sub-grids.

REFERENCES:
patent: 4447773 (1984-05-01), Aston
patent: 5504340 (1996-04-01), Mizumura et al.
patent: 5841235 (1998-11-01), Engelko et al.
patent: 6777882 (2004-08-01), Goldberg et al.
patent: 2003/0079983 (2003-05-01), Long et al.
patent: 2005/0201246 (2005-09-01), Buschbeck et al.
patent: 2005/0253089 (2005-11-01), Maeno et al.
patent: 2006/0113489 (2006-06-01), Ray et al.
patent: 2006/0284114 (2006-12-01), Olson et al.
patent: 06-306619 (1994-11-01), None
patent: 2003-086530 (2003-03-01), None
patent: 2003-132835 (2003-05-01), None
patent: 2005-174569 (2005-06-01), None
patent: 10-1999-0082851 (1999-11-01), None
patent: 10-2000-0053175 (2000-08-01), None
patent: 10-2003-0035946 (2003-05-01), None
patent: 10-2005-0011671 (2005-01-01), None

Affiliated with

Also associated with

Rating

Apparatus and method for controlling ion beam does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and method for controlling ion beam, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for controlling ion beam will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4094560