Apparatus and method for contact-free potential measurements of

Details Apparatus and method for contact-free potential measurements of Apparatus and method for contact-free potential measurements of

1979-12-21

1981-07-07

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

324158D, G01N 2300

Patent

active

042776791

ABSTRACT:
A method and apparatus for the contact-free potential measurement at an electronic component using an electron beam wherein a predetermined potential is applied to the measuring point and the output voltage of a controlled gain amplifier is set to a predetermined reference value U.sub.S by means of controlling a photomultiplier voltage U.sub.PM and the photomultiplier voltage U.sub.PM is maintained constant. The measuring voltage U.sub.M is then determined from the difference of the voltages U.sub.R -U.sub.S between the control unit output voltage U.sub.R and the index value voltage U.sub.S. The method and apparatus allow the quantitative potential measurement to be made on the conducting paths of an integrated circuit without utilizing manual adjustments.

REFERENCES:
patent: 3714424 (1973-01-01), Weber
patent: 4172228 (1979-10-01), Gauthier et al.
patent: 4179604 (1979-12-01), Christou
patent: 4220853 (1980-09-01), Feuerbaum et al.
patent: 4220854 (1980-09-01), Feuerbaum
patent: 4223220 (1980-09-01), Feuerbaum
"Application of Electron Beam Measuring Techniques for Verification of Computer Simulations for Large-Scale Integrated Circuits," Feuerbaum et al., Scanning Electron Microscopy, vol. 1, 1978, pp. 795-800.

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