Apparatus and method for collecting impurities on a...

Details Apparatus and method for collecting impurities on a... Apparatus and method for collecting impurities on a...

2005-09-06

2005-09-06

El-Arini, Zeinab (Department: 1746)

Cleaning and liquid contact with solids

Processes

For metallic, siliceous, or calcareous basework, including...

C134S026000, C134S028000, C134S032000, C134S033000, C134S036000, C134S095100, C134S095200, C134S148000, C134S153000, C134S181000, C134S902000

Reexamination Certificate

active

06939410

ABSTRACT:
An apparatus for collecting impurities on a semiconductor wafer includes an airtight process chamber, a rotary chuck disposed in the process chamber for rotating and horizontally supporting the semiconductor wafer, a first scanning unit for forming a droplet of a first scanning solution and for scanning an upper surface of the semiconductor wafer rotated by the rotary chuck with the droplet to collect first impurities, a driving unit for tilting the rotary chuck and the semiconductor wafer supported on the rotary chuck, and a second scanning unit for receiving a second scanning solution for collecting second impurities from an edge portion of the semiconductor wafer, the second scanning solution being in contact with the edge portion of the semiconductor wafer tilted by the driving unit and rotated by the rotary chuck so that the second scanning solution scans the edge portion of the semiconductor wafer.

REFERENCES:
patent: 5569328 (1996-10-01), Petvai et al.
patent: 6053984 (2000-04-01), Petvai et al.
patent: 6182675 (2001-02-01), Naka et al.
patent: 6517641 (2003-02-01), Fernandez
patent: 2002/0134406 (2002-09-01), Heo et al.
patent: 10-242228 (1998-09-01), None
patent: 2002-0074757 (2002-10-01), None

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