Fluent material handling – with receiver or receiver coacting mea – With soil removing – coating – lubricating – sterilizing and/or... – With cleaning – coating or drying means
Patent
1997-09-30
1999-10-12
Recla, Henry J.
Fluent material handling, with receiver or receiver coacting mea
With soil removing, coating, lubricating, sterilizing and/or...
With cleaning, coating or drying means
141 4, 141 64, 141 89, 141 91, 141 95, 1341022, 134170, B65B 104
Patent
active
059642572
ABSTRACT:
The present invention provides an apparatus and a method for cleaning a liquid dispensing nozzle that is utilized in semiconductor process machines by providing a cleaning solvent reservoir tank capable of receiving a dispensing nozzle and then flowing a cleaning solvent through the nozzle under pressure, and then purging through the dispensing nozzle with a processing fluid to later be utilized such that any residual cleaning solvent is purged out of the dispensing nozzle to prevent the possible back-flow or syphoning of the cleaning solvent into a processing fluid supply and the dilution of such processing fluid. The present invention apparatus is further equipped with a cleaning solvent buffer tank for holding and feeding a cleaning solvent to the reservoir tank such that the pressure in the reservoir tank can be suitably controlled.
REFERENCES:
patent: 4025363 (1977-05-01), De Santis
patent: 4305413 (1981-12-01), Dougherty
patent: 4713257 (1987-12-01), Luttermoller
patent: 5066336 (1991-11-01), Hoffman et al.
patent: 5213117 (1993-05-01), Yamamoto
patent: 5447171 (1995-09-01), Shibano
Lee Chih-Hsiung
Lin Hsun-Peng
Wung Fu-Tein
Maust Timothy L.
Recla Henry J.
Taiwan Semiconductor Manufacturing Company , Ltd.
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