Abrading – Machine – Combined
Patent
1999-06-01
2000-05-30
Eley, Timothy V.
Abrading
Machine
Combined
451442, B24B 700
Patent
active
060685441
ABSTRACT:
An apparatus for calibrating the centering of polishing heads in a polishing machine that is equipped with a plurality of spindles onto which polishing heads are mounted and a method for using such apparatus are disclosed. In the apparatus, a calibration disc is provided which has a hollow shaft mounted at a center of the bottom surface of the disc. A centering pin slidingly engaging an elongated cavity in the hollow shaft such that its protruded tip portion may be adjusted by using a locking device such as a set screw for different calibration procedures. The present invention novel apparatus can be used to calibrate the positioning of a polishing head mounted in a spindle with a pedestal in a load cup that is equipped with a center alignment aperture. The calibration can be conducted not only in the X, Y direction (or in the circumferential direction) of the spindle movement, but also in the Z direction (or a sweep direction) of the traversing spindle that occurs during a polishing operation.
REFERENCES:
patent: 3741567 (1973-06-01), Bis
patent: 4447956 (1984-05-01), Chung
patent: 4659094 (1987-04-01), Leonov
patent: 5549502 (1996-08-01), Tanaka et al.
Chiu Chen-Chia
Lu Fang-Lin
Shen Yu-Sheng
Yeh Kuo-Pao
Eley Timothy V.
Nguyen Dung Van
Taiwan Semiconductor Manufacturing Co. Ltd.
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