4. Abrading
  5. Machine
  6. Combined

Yu-Sheng Shen

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Apparatus and method for calibrating a polishing head

Abrading – Machine – Combined
Patent

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Apparatus and method for removing an adhesive bonded pad

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Apparatus and method for retaining moisture on a polishing pad

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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