Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate
2008-07-01
2008-07-01
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
C250S234000, C250S310000, C250S208100, C356S237200, C356S398000, C356S600000
Reexamination Certificate
active
11554280
ABSTRACT:
An automated optical inspection system, comprising at least one camera having a field of view; and at least one image scanning module comprising a plurality of objective modules arranged to have fields of view covering a portion of an article during inspection, and an image selection mirror mechanism, such as a pentaprism movable to sequentially select and transfer images of the fields of view from the objective modules to the at least one camera, and a beam splitter operative to simultaneously direct illumination from at least one illumination source to a portion of the article and to direct an image of the portion of the article to at least one camera, wherein the beam splitter is operative to pivot about at least one axis, thereby to create motion of the image of the article within the field of view of the camera. The objective modules may be arranged in a pair of back-to-back arcs each served by and partially encircling its own optical head. The image selection mirror mechanism may be rotated by a rotating shaft having a driving end, the mechanism being disposed between the shaft's driving end, and the article.
REFERENCES:
patent: 6177954 (2001-01-01), Bouvier
patent: 7109464 (2006-09-01), Cartlidge et al.
patent: 7122786 (2006-10-01), Tochio et al.
patent: 2001/0012107 (2001-08-01), Toh
Kenan Boaz
Tirosh Ehud
Alli Iyabo S
Applied Materials Inc.
Lauchman Layla G.
Patterson & Sheridan LLP
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