Apparatus and method for analyzing foreign matter on semiconduct

Details Apparatus and method for analyzing foreign matter on semiconduct Apparatus and method for analyzing foreign matter on semiconduct

1995-10-16

1996-08-27

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, H01J 37256

Patent

active

055503721

ABSTRACT:
A device for analyzing foreign matter on semiconductor wafers is provided, which is capable of analyzing a great deal of foreign matter rapidly without requiring the higher level decision capabilities of a skilled analyst. The device for analyzing foreign matter on semiconductor wafers includes a scanning electron microscope (SEM) which obtains the composition ratios of each element of a plurality of foreign matter adhered to semiconductor wafers. A foreign matter plotting section is provided to obtain the distribution of the composition ratios of the plurality of foreign matter on the basis of a result obtained by the SEM. A foreign matter classifying process section classifies the plurality of foreign matter on the basis of the distribution. A foreign matter identifying process section compares the foreign matter classification result with data stored in advance in a foreign matter data base, thereby identifying the foreign matter type.

REFERENCES:
patent: 4037101 (1977-07-01), Okumura et al.
patent: 4857731 (1989-08-01), Tagata
patent: 5233191 (1993-08-01), Noguchi et al.
Kawahigashita, Takashi; "Handoutai Hyoka Gijitsu (Semiconductor Technique)"pp. 166-172. Sangyo-Tosho, Feb. 28, 1989.
Usami, Akira; "100 Rei ni Miru Handoutai Hyoka Gijutsu (Semiconductor Evaluation Techniques: 100 cases)"; May 1, 1988.

Affiliated with

Also associated with

Rating

Apparatus and method for analyzing foreign matter on semiconduct does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and method for analyzing foreign matter on semiconduct, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and method for analyzing foreign matter on semiconduct will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1057686