Apparatus and method for adjusting optical axis of electron micr

Details Apparatus and method for adjusting optical axis of electron micr Apparatus and method for adjusting optical axis of electron micr

1983-03-04

1985-07-23

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250397, H01J 3726

Patent

active

045310572

ABSTRACT:
An apparatus and a method for adjusting the optical axis of the electron microscope is disclosed, in which the convergence of the electron beam radiated on a specimen is adjusted by a radiation lens system, the optical axis of the electron beam is adjusted by electron beam deflectors, the electron beam from the specimen is focused to form an enlarged image of the specimen in an image-forming lens system, and the enlarged image is displayed while at the same time detecting the electron beam quantity by a phosphor plate. The optical axis is set by controlling the electron beam deflectors in a manner to maximize the electron beam quantity detected by the phosphor plate.

REFERENCES:
patent: 3919550 (1975-11-01), Banbury
patent: 3937959 (1976-02-01), Namae
patent: 4045669 (1977-08-01), Kamimura et al.
patent: 4068123 (1978-01-01), Kokubo
patent: 4189641 (1980-02-01), Katagiri et al.

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