Apparatus and method for a scanning probe microscope

Details Apparatus and method for a scanning probe microscope Apparatus and method for a scanning probe microscope

2006-04-04

2006-04-04

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S42300F, C250S234000, C359S372000, C359S375000, C073S105000

Reexamination Certificate

active

07022985

ABSTRACT:
The invention relates to an apparatus and a method for a scanning probe microscope, comprising a measuring assembly which includes a lateral shifting unit to displace a probe in a plane, a vertical shifting unit to displace the probe in a direction perpendicular to the plane, and a specimen support to receive a specimen. A condenser light path is formed through the measuring assembly so that the specimen support is located in the area of an end of the condenser light path.

REFERENCES:
patent: 5616916 (1997-04-01), Handa et al.
patent: 6032518 (2000-03-01), Prater et al.
patent: 0 564 088 (1993-10-01), None
Werf Van Der. K. et al., “Compact Stand-Alone Atomic Force Microscope”, Review of Scientific Instruments, Oct. , 1993, pp. 2892-2897, vol. 64, No. 10, American Institute of Physics, New York.

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