Material or article handling – Process – Of moving material between zones having different pressures...
Reexamination Certificate
2011-08-16
2011-08-16
Fox, Charles A (Department: 3652)
Material or article handling
Process
Of moving material between zones having different pressures...
C029S428000
Reexamination Certificate
active
07997851
ABSTRACT:
A new apparatus for processing substrates is disclosed. A multi-level load lock chamber having four environmentally isolated chambers interfaces with a transfer chamber that has a robotic assembly. The robotic assembly has two arms that each can move horizontally as the robotic assembly rotates about its axis. The arms can reach into the isolated chambers of the load lock to receive substrates from the bottom isolated chambers, transport the substrates to process chambers, and then place the substrates in the upper chambers. The isolated chambers in the load lock chamber may have a pivotably attached lid that may be opened to access the inside of the isolated chambers.
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Moore Robert B.
Ruhland Eric
Silvetti Mario David
Sundar Satish
Applied Materials Inc.
Fox Charles A
Patterson & Sheridan L.L.P.
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