Apparatus and method employing interface heater segment for cont

Details Apparatus and method employing interface heater segment for cont Apparatus and method employing interface heater segment for cont

1990-12-17

1992-08-11

Kunemund, Robert

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including specific material of construction

156601, 1566171, 1566181, 1566191, 422249, B01D 900

Patent

active

051376997

ABSTRACT:
An apparatus and method employing an interface heater segment for control of a shape of a peripheral edge region of a solidification interface in a Czochralski crystal pulling process are provided wherein an interface heater segment, independently controllable from a primary heater, is provided at the level of the solidification interface around the periphery of the crucible, the interface heater segment being selectively controlled to influence the shape of the solidification interface at the peripheral edge region thereof, in order to eliminate problems experienced with edge downturn at the peripheral edge region of the interface.

REFERENCES:
patent: 3795488 (1974-03-01), Oliver
patent: 4133969 (1979-01-01), Zumbrunnen
patent: 4350557 (1982-09-01), Scholl et al.
patent: 4604262 (1986-08-01), Nishizawa
patent: 4650540 (1987-03-01), Stoll
patent: 4654110 (1987-03-01), Morrison
patent: 4734267 (1988-03-01), Kojima
patent: 4822449 (1990-04-01), Motakef
patent: 4857278 (1990-08-01), Gevelber et al.
"The Suppression of Thermal Oscillations In Czchralski Growth;" Whiffin et al.; Jounal of Crystal Growth (10) (1971); pp. 91-96.

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