Apparatus and a method for shielding light emanating from a ligh

Details Apparatus and a method for shielding light emanating from a ligh Apparatus and a method for shielding light emanating from a ligh

1998-01-09

2000-08-29

Silverman, Stanley S.

Coating apparatus

Gas or vapor deposition

118725, 118728, 118729, 118730, 438717, 438942, 2504922, 2505151, C23C 1600

Patent

active

061102849

ABSTRACT:
A semiconductor processing system comprising a semiconductor processing chamber, a light, a temperature detector, and a member. The light is positioned to heat the confines of the chamber. The temperature detector measures the temperature at the location within the chamber. The member has a translucent quartz shell and opaque core and shields the location from light emanating from the light source.

REFERENCES:
patent: 2223118 (1940-11-01), Miller
patent: 2858451 (1958-10-01), Silversher
patent: 3882901 (1975-05-01), Seiler et al.
patent: 3925583 (1975-12-01), Rau et al.
patent: 4041872 (1977-08-01), McCown et al.
patent: 4550245 (1985-10-01), Arai et al.
patent: 5562774 (1996-10-01), Breidenbach et al.
patent: 5583318 (1996-12-01), Powell
patent: 5589003 (1996-12-01), Zhao et al.
patent: 5660472 (1997-08-01), Peuse et al.
patent: 5781693 (1998-07-01), Ballance et al.

Affiliated with

Also associated with

Rating

Apparatus and a method for shielding light emanating from a ligh does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus and a method for shielding light emanating from a ligh, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus and a method for shielding light emanating from a ligh will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1245412