Antireflective coatings

Details Antireflective coatings Antireflective coatings

2007-05-15

2007-05-15

Walke, Amanda (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

C430S271100, C430S910000

Reexamination Certificate

active

10455095

ABSTRACT:
An antireflective coating composition including a polyester and/or a polyurethane; and a crosslinker selected from the group consisting of tetraamidomethyl ethers.

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English language abstract of JP 11-171887.
Jim D. Meador et al.; Recent Progress in 193 nm Antireflective Coatings; SPIE; Feb. 26, 1999; pp. 800-809; vol. 3678.
Handbook of Microlithography, Micromachining, and Microfabrication, vol. 1: MICROLITHOGRAPHY; pp. 366-368; SPIE Optical Engineering Press; Bellingham, Washington, USA.
Sorenson, Wayne R.: Preparative Methods of Polymer Chemistry; Interscience Publishers, Inc.; New York; 1961; E.I. du Pont de Nemours & Company, Inc.

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