Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Processes of preparing a desired or intentional composition...
Patent
1997-04-30
1999-11-30
Lipman, Bernard
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Processes of preparing a desired or intentional composition...
526281, 526288, 526298, 526312, 4302701, 430192, 430326, 430330, C08K 500
Patent
active
059944307
ABSTRACT:
The present invention relates to an antireflective coating composition comprising a novel polymer in a solvent composition. The invention further comprises processes for using the antireflective coating composition in photolithography. The antireflective coating composition comprises a novel polymer and a solvent composition, where the novel polymer of the antireflective coating comprises at least one unit containing a dye that absorbs from about 180 nm to about 450 nm and at least one unit that contains no aromatic funtionality. The solvent may be organic, preferrably, a solvent of low toxicity, or it may be water, which may additionally contain other water miscible organic solvents.
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Dammel Ralph R.
Ding Shuji
Durham Dana L.
Khanna Dinesh N.
Lu Ping-Hung
Clariant Finance (BVI) Limited
Jain Sangya
Lipman Bernard
Sarofim N.
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