Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2006-10-18
2010-02-23
Hamilton, Cynthia (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S326000, C430S325000, C438S952000, C525S219000
Reexamination Certificate
active
07666575
ABSTRACT:
The present invention relates to an antireflective coating composition comprising, (i) a thermal acid generator; (ii) a crosslinkable polymer comprising at least one aromatic group; and, (iii) a polymeric crosslinker comprising at least one unit of structure (6),where R11to R13is independently selected from H, (C1-C6) alkyl and aromatic group, R14and R15are independently (C1-C10) alkyl. The invention also relates to a process for imaging the antireflective coating composition of the present invention.
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Abdallah David
Kim Woo-Kyu
Lu Ping-Hung
Neisser Mark
Rahman M. Dalil
AZ Electronic Materials USA Corp
Hamilton Cynthia
Jain Sangya
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